Accurate determination of optical constants and thickness of absorbing thin films by a combined ellipsometry and spectrophotometry approach

Zhou Yi; Wu Guo-Song; Dai Wei; Li Hong-Bo; Wang Ai-Ying

doi:10.7498/aps.59.2356

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Zhou Yi, Wu Guo-Song, Dai Wei, Li Hong-Bo, Wang Ai-Ying. Accurate determination of optical constants and thickness of absorbing thin films by a combined ellipsometry and spectrophotometry approachJ. Acta Physica Sinica, 2010, 59(4): 2356-2363. DOI: 10.7498/aps.59.2356

Citation:

Zhou Yi, Wu Guo-Song, Dai Wei, Li Hong-Bo, Wang Ai-Ying. Accurate determination of optical constants and thickness of absorbing thin films by a combined ellipsometry and spectrophotometry approachJ. Acta Physica Sinica, 2010, 59(4): 2356-2363. DOI: 10.7498/aps.59.2356

Citation:

Zhou Yi, Wu Guo-Song, Dai Wei, Li Hong-Bo, Wang Ai-Ying. Accurate determination of optical constants and thickness of absorbing thin films by a combined ellipsometry and spectrophotometry approachJ. Acta Physica Sinica, 2010, 59(4): 2356-2363. DOI: 10.7498/aps.59.2356