Femtosecond laser ablation of silicon wafers in air and water

Wang Rui; Yang Jian-Jun; Liang Chun-Yong; Wang Hong-Shui; Han Wei; Yang Yang

doi:10.7498/aps.58.5429

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Wang Rui, Yang Jian-Jun, Liang Chun-Yong, Wang Hong-Shui, Han Wei, Yang Yang. Femtosecond laser ablation of silicon wafers in air and waterJ. Acta Physica Sinica, 2009, 58(8): 5429-5435. DOI: 10.7498/aps.58.5429

Citation:

Wang Rui, Yang Jian-Jun, Liang Chun-Yong, Wang Hong-Shui, Han Wei, Yang Yang. Femtosecond laser ablation of silicon wafers in air and waterJ. Acta Physica Sinica, 2009, 58(8): 5429-5435. DOI: 10.7498/aps.58.5429

Citation:

Wang Rui, Yang Jian-Jun, Liang Chun-Yong, Wang Hong-Shui, Han Wei, Yang Yang. Femtosecond laser ablation of silicon wafers in air and waterJ. Acta Physica Sinica, 2009, 58(8): 5429-5435. DOI: 10.7498/aps.58.5429