Dynamics study of the adsorption and diffusion in early growth stage of AlN/α-Al2Ｏ3（0001） films

Yang Chun; Feng Yu Fang; Yu Yi

doi:10.7498/aps.58.3553

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Yang Chun, Feng Yu Fang, Yu Yi. Dynamics study of the adsorption and diffusion in early growth stage of AlN/α-Al2Ｏ3（0001） filmsJ. Acta Physica Sinica, 2009, 58(5): 3553-3559. DOI: 10.7498/aps.58.3553

Citation:

Yang Chun, Feng Yu Fang, Yu Yi. Dynamics study of the adsorption and diffusion in early growth stage of AlN/α-Al2Ｏ3（0001） filmsJ. Acta Physica Sinica, 2009, 58(5): 3553-3559. DOI: 10.7498/aps.58.3553

Citation:

Yang Chun, Feng Yu Fang, Yu Yi. Dynamics study of the adsorption and diffusion in early growth stage of AlN/α-Al2Ｏ3（0001） filmsJ. Acta Physica Sinica, 2009, 58(5): 3553-3559. DOI: 10.7498/aps.58.3553