The surface energy and nano-adhesion behavior of some micro-component material in MEMS

Xue Wei; Xie Guo-Xin; Wang Quan; Zhang Miao; Zheng Bei-Rong

doi:10.7498/aps.58.2518

Search

x

Xue Wei, Xie Guo-Xin, Wang Quan, Zhang Miao, Zheng Bei-Rong. The surface energy and nano-adhesion behavior of some micro-component material in MEMSJ. Acta Physica Sinica, 2009, 58(4): 2518-2522. DOI: 10.7498/aps.58.2518

Citation:

Xue Wei, Xie Guo-Xin, Wang Quan, Zhang Miao, Zheng Bei-Rong. The surface energy and nano-adhesion behavior of some micro-component material in MEMSJ. Acta Physica Sinica, 2009, 58(4): 2518-2522. DOI: 10.7498/aps.58.2518

Citation:

Xue Wei, Xie Guo-Xin, Wang Quan, Zhang Miao, Zheng Bei-Rong. The surface energy and nano-adhesion behavior of some micro-component material in MEMSJ. Acta Physica Sinica, 2009, 58(4): 2518-2522. DOI: 10.7498/aps.58.2518