Search

x
中国物理学会期刊
Advanced Search
Liu Bo, Tang Wen-Jin, Song Zhong-Xiao, Chen Ya-Shao, Xu Ke-Wei. Effect of N-doping on the microstructure and properties of amorphous SiC:H diffusion barrier filmsJ. Acta Physica Sinica, 2009, 58(3): 2042-2048. DOI: 10.7498/aps.58.2042
Citation: Liu Bo, Tang Wen-Jin, Song Zhong-Xiao, Chen Ya-Shao, Xu Ke-Wei. Effect of N-doping on the microstructure and properties of amorphous SiC:H diffusion barrier filmsJ. Acta Physica Sinica, 2009, 58(3): 2042-2048. DOI: 10.7498/aps.58.2042
shu

Effect of N-doping on the microstructure and properties of amorphous SiC:H diffusion barrier films

Acta Phys. Sin., 2009, 58(3): 2042-2048.
DOI: 10.7498/aps.58.2042
CSTR: 32037.14.aps.58.2042
PDF
Get Citation

  • Abstract

    Authors and contacts

    References

Turn off MathJax
Article Contents

Catalog

    /

    DownLoad:  Full-Size Img  PowerPoint
    Return
    Return
    Baidu
    map