Preparation and properties of GeC thin films deposited by reactive RF magnetron sputtering

Li Yang-Ping; Liu Zheng-Tang; Liu Wen-Ting; Yan Feng; Chen Jing

doi:10.7498/aps.57.6587

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Li Yang-Ping, Liu Zheng-Tang, Liu Wen-Ting, Yan Feng, Chen Jing. Preparation and properties of GeC thin films deposited by reactive RF magnetron sputteringJ. Acta Physica Sinica, 2008, 57(10): 6587-6592. DOI: 10.7498/aps.57.6587

Citation:

Li Yang-Ping, Liu Zheng-Tang, Liu Wen-Ting, Yan Feng, Chen Jing. Preparation and properties of GeC thin films deposited by reactive RF magnetron sputteringJ. Acta Physica Sinica, 2008, 57(10): 6587-6592. DOI: 10.7498/aps.57.6587

Citation:

Li Yang-Ping, Liu Zheng-Tang, Liu Wen-Ting, Yan Feng, Chen Jing. Preparation and properties of GeC thin films deposited by reactive RF magnetron sputteringJ. Acta Physica Sinica, 2008, 57(10): 6587-6592. DOI: 10.7498/aps.57.6587