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中国物理学会期刊
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Sun Kai, Xin Yu, Huang Xiao-Jiang, Yuan Qiang-Hua, Ning Zhao-Yuan. Characteristics of electron energy distribution function of capacitively coupled plasma excited by 60MHz RF sourceJ. Acta Physica Sinica, 2008, 57(10): 6465-6470. DOI: 10.7498/aps.57.6465
Citation: Sun Kai, Xin Yu, Huang Xiao-Jiang, Yuan Qiang-Hua, Ning Zhao-Yuan. Characteristics of electron energy distribution function of capacitively coupled plasma excited by 60MHz RF sourceJ. Acta Physica Sinica, 2008, 57(10): 6465-6470. DOI: 10.7498/aps.57.6465
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Characteristics of electron energy distribution function of capacitively coupled plasma excited by 60MHz RF source

Acta Phys. Sin., 2008, 57(10): 6465-6470.
DOI: 10.7498/aps.57.6465
CSTR: 32037.14.aps.57.6465
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