Two-dimensional particle-in-cell simulation of the ion sheath dynamics in plasma source ion implantation of a hemispherical bowl-shaped target

Liu Cheng-Sen; Wang De-Zhen; Liu Tian-Wei; Wang Yan-Hui

doi:10.7498/aps.57.6450

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Liu Cheng-Sen, Wang De-Zhen, Liu Tian-Wei, Wang Yan-Hui. Two-dimensional particle-in-cell simulation of the ion sheath dynamics in plasma source ion implantation of a hemispherical bowl-shaped targetJ. Acta Physica Sinica, 2008, 57(10): 6450-6456. DOI: 10.7498/aps.57.6450

Citation:

Liu Cheng-Sen, Wang De-Zhen, Liu Tian-Wei, Wang Yan-Hui. Two-dimensional particle-in-cell simulation of the ion sheath dynamics in plasma source ion implantation of a hemispherical bowl-shaped targetJ. Acta Physica Sinica, 2008, 57(10): 6450-6456. DOI: 10.7498/aps.57.6450

Citation:

Liu Cheng-Sen, Wang De-Zhen, Liu Tian-Wei, Wang Yan-Hui. Two-dimensional particle-in-cell simulation of the ion sheath dynamics in plasma source ion implantation of a hemispherical bowl-shaped targetJ. Acta Physica Sinica, 2008, 57(10): 6450-6456. DOI: 10.7498/aps.57.6450