Zhu Wei-Zhong, Wu Yan-Qing, Guo Zhi, Zhu Xiao-Li, Ma Jie, Xie Chang-Qing, Shi Pei-Xiong, Zhou Hong-Jun, Huo Tong-Lin, Tai Ren-Zhong, Xu Hong-Jie. The design, fabrication and performance of a large area 10000 line/mm metal transmission diffraction gratings for soft X-rayJ. Acta Physica Sinica, 2008, 57(10): 6386-6392. DOI: 10.7498/aps.57.6386