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中国物理学会期刊
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Sun Hao-Liang, Song Zhong-Xiao, Xu Ke-Wei. Effect of substrate constraint on stress-induced cracking of sputtered tungsten thin filmJ. Acta Physica Sinica, 2008, 57(8): 5226-5231. DOI: 10.7498/aps.57.5226
Citation: Sun Hao-Liang, Song Zhong-Xiao, Xu Ke-Wei. Effect of substrate constraint on stress-induced cracking of sputtered tungsten thin filmJ. Acta Physica Sinica, 2008, 57(8): 5226-5231. DOI: 10.7498/aps.57.5226
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Effect of substrate constraint on stress-induced cracking of sputtered tungsten thin film

Acta Phys. Sin., 2008, 57(8): 5226-5231.
DOI: 10.7498/aps.57.5226
CSTR: 32037.14.aps.57.5226
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