Ding Wan-Yu, Xu Jun, Lu Wen-Qi, Deng Xin-Lu, Dong Chuang. Influences of substrate temperature on crystalline characteristics and mechanical properties of SiNx films deposited by microwave electron cyclotron resonance magnetron sputteringJ. Acta Physica Sinica, 2008, 57(8): 5170-5175. DOI: 10.7498/aps.57.5170