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中国物理学会期刊
Gao Fei, Mao Ming, Ding Zhen-Feng, Wang You-Nian. Langmuir probe measurement and theoretical studies on inductively coupled plasma in Ar-N2 dischargeJ. Acta Physica Sinica, 2008, 57(8): 5123-5129. DOI: 10.7498/aps.57.5123
Citation: Gao Fei, Mao Ming, Ding Zhen-Feng, Wang You-Nian. Langmuir probe measurement and theoretical studies on inductively coupled plasma in Ar-N2 dischargeJ. Acta Physica Sinica, 2008, 57(8): 5123-5129. DOI: 10.7498/aps.57.5123

Langmuir probe measurement and theoretical studies on inductively coupled plasma in Ar-N2 discharge

CSTR: 32037.14.aps.57.5123
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