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中国物理学会期刊
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Ding Zhen-Feng, Yuan Guo-Yu, Gao Wei, Sun Jing-Chao. Experimental studies on the properties of the discharge modes in a cylindrical radio frequency inductively coupled plasmaJ. Acta Physica Sinica, 2008, 57(7): 4304-4315. DOI: 10.7498/aps.57.4304
Citation: Ding Zhen-Feng, Yuan Guo-Yu, Gao Wei, Sun Jing-Chao. Experimental studies on the properties of the discharge modes in a cylindrical radio frequency inductively coupled plasmaJ. Acta Physica Sinica, 2008, 57(7): 4304-4315. DOI: 10.7498/aps.57.4304
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Experimental studies on the properties of the discharge modes in a cylindrical radio frequency inductively coupled plasma

Acta Phys. Sin., 2008, 57(7): 4304-4315.
DOI: 10.7498/aps.57.4304
CSTR: 32037.14.aps.57.4304
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