Study on the mechanical properties of diamond like carbon films with Si doping

Zhao Dong-Cai; Ren Ni; Ma Zhan-Ji; Qiu Jia-Wen; Xiao Geng-Jie; Wu Sheng-Hu

doi:10.7498/aps.57.1935

Search

x

Zhao Dong-Cai, Ren Ni, Ma Zhan-Ji, Qiu Jia-Wen, Xiao Geng-Jie, Wu Sheng-Hu. Study on the mechanical properties of diamond like carbon films with Si dopingJ. Acta Physica Sinica, 2008, 57(3): 1935-1940. DOI: 10.7498/aps.57.1935

Citation:

Zhao Dong-Cai, Ren Ni, Ma Zhan-Ji, Qiu Jia-Wen, Xiao Geng-Jie, Wu Sheng-Hu. Study on the mechanical properties of diamond like carbon films with Si dopingJ. Acta Physica Sinica, 2008, 57(3): 1935-1940. DOI: 10.7498/aps.57.1935

Citation:

Zhao Dong-Cai, Ren Ni, Ma Zhan-Ji, Qiu Jia-Wen, Xiao Geng-Jie, Wu Sheng-Hu. Study on the mechanical properties of diamond like carbon films with Si dopingJ. Acta Physica Sinica, 2008, 57(3): 1935-1940. DOI: 10.7498/aps.57.1935