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中国物理学会期刊
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Liu Feng, Meng Yue-Dong, Ren Zhao-Xing, Shu Xing-Sheng. Characterization of ZrN films deposited by ICP enhanced RF magnetron sputteringJ. Acta Physica Sinica, 2008, 57(3): 1796-1801. DOI: 10.7498/aps.57.1796
Citation: Liu Feng, Meng Yue-Dong, Ren Zhao-Xing, Shu Xing-Sheng. Characterization of ZrN films deposited by ICP enhanced RF magnetron sputteringJ. Acta Physica Sinica, 2008, 57(3): 1796-1801. DOI: 10.7498/aps.57.1796
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Characterization of ZrN films deposited by ICP enhanced RF magnetron sputtering

Acta Phys. Sin., 2008, 57(3): 1796-1801.
DOI: 10.7498/aps.57.1796
CSTR: 32037.14.aps.57.1796
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