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中国物理学会期刊
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Xie Guo-Feng. Improving parallel electrode method by sputtering atoms' angle distribution ruleJ. Acta Physica Sinica, 2008, 57(3): 1784-1787. DOI: 10.7498/aps.57.1784
Citation: Xie Guo-Feng. Improving parallel electrode method by sputtering atoms' angle distribution ruleJ. Acta Physica Sinica, 2008, 57(3): 1784-1787. DOI: 10.7498/aps.57.1784
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Improving parallel electrode method by sputtering atoms' angle distribution rule

Acta Phys. Sin., 2008, 57(3): 1784-1787.
DOI: 10.7498/aps.57.1784
CSTR: 32037.14.aps.57.1784
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