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中国物理学会期刊
Liao Nai-Man, Li Wei, Jiang Ya-Dong, Kuang Yue-Jun, Qi Kang-Cheng, Li Shi-Bin, Wu Zhi-Ming. Thickness and optical constant determination of hydrogenated amorphous silicon thin film from transmittance spectra of ellipsometerJ. Acta Physica Sinica, 2008, 57(3): 1542-1547. DOI: 10.7498/aps.57.1542
Citation: Liao Nai-Man, Li Wei, Jiang Ya-Dong, Kuang Yue-Jun, Qi Kang-Cheng, Li Shi-Bin, Wu Zhi-Ming. Thickness and optical constant determination of hydrogenated amorphous silicon thin film from transmittance spectra of ellipsometerJ. Acta Physica Sinica, 2008, 57(3): 1542-1547. DOI: 10.7498/aps.57.1542

Thickness and optical constant determination of hydrogenated amorphous silicon thin film from transmittance spectra of ellipsometer

CSTR: 32037.14.aps.57.1542
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