Luo Yu-Feng, Zhong Cheng, Zhang Li, Yan Xue-Jian, Li Jin, Jiang Yi-Ming. An in situ method for characterizing the kinetics of the oxidation process of copper thin films via sheet resistanceJ. Acta Physica Sinica, 2007, 56(11): 6722-6726. DOI: 10.7498/aps.56.6722
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Citation:
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Luo Yu-Feng, Zhong Cheng, Zhang Li, Yan Xue-Jian, Li Jin, Jiang Yi-Ming. An in situ method for characterizing the kinetics of the oxidation process of copper thin films via sheet resistanceJ. Acta Physica Sinica, 2007, 56(11): 6722-6726. DOI: 10.7498/aps.56.6722
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Luo Yu-Feng, Zhong Cheng, Zhang Li, Yan Xue-Jian, Li Jin, Jiang Yi-Ming. An in situ method for characterizing the kinetics of the oxidation process of copper thin films via sheet resistanceJ. Acta Physica Sinica, 2007, 56(11): 6722-6726. DOI: 10.7498/aps.56.6722
|
Citation:
|
Luo Yu-Feng, Zhong Cheng, Zhang Li, Yan Xue-Jian, Li Jin, Jiang Yi-Ming. An in situ method for characterizing the kinetics of the oxidation process of copper thin films via sheet resistanceJ. Acta Physica Sinica, 2007, 56(11): 6722-6726. DOI: 10.7498/aps.56.6722
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