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中国物理学会期刊
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Yu Yi-Ting, Yuan Wei-Zheng, Qiao Da-Yong, Liang Qing. A novel microstructure for in-situ measurement of residual stress in micromechanical thin filmsJ. Acta Physica Sinica, 2007, 56(10): 5691-5697. DOI: 10.7498/aps.56.5691
Citation: Yu Yi-Ting, Yuan Wei-Zheng, Qiao Da-Yong, Liang Qing. A novel microstructure for in-situ measurement of residual stress in micromechanical thin filmsJ. Acta Physica Sinica, 2007, 56(10): 5691-5697. DOI: 10.7498/aps.56.5691
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A novel microstructure for in-situ measurement of residual stress in micromechanical thin films

Acta Phys. Sin., 2007, 56(10): 5691-5697.
DOI: 10.7498/aps.56.5691
CSTR: 32037.14.aps.56.5691
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