Effect of implantation of nitrogen into SIMOX buried oxide on its fixed positive charge density

Zheng Zhong-Shan; Zhang En-Xia; Liu Zhong-Li; Zhang Zheng-Xuan; Li Ning; Li Guo-Hua

doi:10.7498/aps.56.5446

Search

x

Zheng Zhong-Shan, Zhang En-Xia, Liu Zhong-Li, Zhang Zheng-Xuan, Li Ning, Li Guo-Hua. Effect of implantation of nitrogen into SIMOX buried oxide on its fixed positive charge densityJ. Acta Physica Sinica, 2007, 56(9): 5446-5451. DOI: 10.7498/aps.56.5446

Citation:

Zheng Zhong-Shan, Zhang En-Xia, Liu Zhong-Li, Zhang Zheng-Xuan, Li Ning, Li Guo-Hua. Effect of implantation of nitrogen into SIMOX buried oxide on its fixed positive charge densityJ. Acta Physica Sinica, 2007, 56(9): 5446-5451. DOI: 10.7498/aps.56.5446

Citation:

Zheng Zhong-Shan, Zhang En-Xia, Liu Zhong-Li, Zhang Zheng-Xuan, Li Ning, Li Guo-Hua. Effect of implantation of nitrogen into SIMOX buried oxide on its fixed positive charge densityJ. Acta Physica Sinica, 2007, 56(9): 5446-5451. DOI: 10.7498/aps.56.5446