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中国物理学会期刊
Yang Hang-Sheng, Xie Ying-Jun. Controlling the interfacial structure of cubic boron nitride thin film prepared by plasma-enhanced chemical vapor depositionJ. Acta Physica Sinica, 2007, 56(9): 5400-5407. DOI: 10.7498/aps.56.5400
Citation: Yang Hang-Sheng, Xie Ying-Jun. Controlling the interfacial structure of cubic boron nitride thin film prepared by plasma-enhanced chemical vapor depositionJ. Acta Physica Sinica, 2007, 56(9): 5400-5407. DOI: 10.7498/aps.56.5400

Controlling the interfacial structure of cubic boron nitride thin film prepared by plasma-enhanced chemical vapor deposition

CSTR: 32037.14.aps.56.5400
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