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中国物理学会期刊
Chen Hao, Deng Jin-Xiang, Liu Jun-Kai, Zhou Tao, Zhang Yan, Chen Guang-Hua. Phase transformation in process of deposition of cubic boron nitride thin filmsJ. Acta Physica Sinica, 2007, 56(6): 3418-3427. DOI: 10.7498/aps.56.3418
Citation: Chen Hao, Deng Jin-Xiang, Liu Jun-Kai, Zhou Tao, Zhang Yan, Chen Guang-Hua. Phase transformation in process of deposition of cubic boron nitride thin filmsJ. Acta Physica Sinica, 2007, 56(6): 3418-3427. DOI: 10.7498/aps.56.3418

Phase transformation in process of deposition of cubic boron nitride thin films

CSTR: 32037.14.aps.56.3418
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