Dispersion feature in arbitrary direction of surface acoustic wave applied to property characterization of ultra-large-scale integrated circuit interconnect films

Xiao Xia; You Xue-Yi; Yao Su-Ying

doi:10.7498/aps.56.2428

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Xiao Xia, You Xue-Yi, Yao Su-Ying. Dispersion feature in arbitrary direction of surface acoustic wave applied to property characterization of ultra-large-scale integrated circuit interconnect filmsJ. Acta Physica Sinica, 2007, 56(4): 2428-2433. DOI: 10.7498/aps.56.2428

Citation:

Xiao Xia, You Xue-Yi, Yao Su-Ying. Dispersion feature in arbitrary direction of surface acoustic wave applied to property characterization of ultra-large-scale integrated circuit interconnect filmsJ. Acta Physica Sinica, 2007, 56(4): 2428-2433. DOI: 10.7498/aps.56.2428

Citation:

Xiao Xia, You Xue-Yi, Yao Su-Ying. Dispersion feature in arbitrary direction of surface acoustic wave applied to property characterization of ultra-large-scale integrated circuit interconnect filmsJ. Acta Physica Sinica, 2007, 56(4): 2428-2433. DOI: 10.7498/aps.56.2428