Influences of acetylene gas flow rate on mechanical properties and chemical structure of nanocomposite TiC diamond-like carbon films

Ma Guo-Jia; Liu Xi-Liang; Zhang Hua-Fang; Wu Hong-Chen; Peng Li-Ping; Jiang Yan-Li

doi:10.7498/aps.56.2377

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Ma Guo-Jia, Liu Xi-Liang, Zhang Hua-Fang, Wu Hong-Chen, Peng Li-Ping, Jiang Yan-Li. Influences of acetylene gas flow rate on mechanical properties and chemical structure of nanocomposite TiC diamond-like carbon filmsJ. Acta Physica Sinica, 2007, 56(4): 2377-2381. DOI: 10.7498/aps.56.2377

Citation:

Ma Guo-Jia, Liu Xi-Liang, Zhang Hua-Fang, Wu Hong-Chen, Peng Li-Ping, Jiang Yan-Li. Influences of acetylene gas flow rate on mechanical properties and chemical structure of nanocomposite TiC diamond-like carbon filmsJ. Acta Physica Sinica, 2007, 56(4): 2377-2381. DOI: 10.7498/aps.56.2377

Citation:

Ma Guo-Jia, Liu Xi-Liang, Zhang Hua-Fang, Wu Hong-Chen, Peng Li-Ping, Jiang Yan-Li. Influences of acetylene gas flow rate on mechanical properties and chemical structure of nanocomposite TiC diamond-like carbon filmsJ. Acta Physica Sinica, 2007, 56(4): 2377-2381. DOI: 10.7498/aps.56.2377