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中国物理学会期刊
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Wei Yong-Xia, Qian Xiao-Mei, Yu Xiao-Zhu, Ye Chao, Ning Zhao-Yuan, Liang Rong-Qing. Effect of O2-doping on bonding configuration and electric properties of SiCOH films prepared by decamethylcyclopentasiloxane electron cyclotron resonance plasmaJ. Acta Physica Sinica, 2007, 56(2): 1172-1176. DOI: 10.7498/aps.56.1172
Citation: Wei Yong-Xia, Qian Xiao-Mei, Yu Xiao-Zhu, Ye Chao, Ning Zhao-Yuan, Liang Rong-Qing. Effect of O2-doping on bonding configuration and electric properties of SiCOH films prepared by decamethylcyclopentasiloxane electron cyclotron resonance plasmaJ. Acta Physica Sinica, 2007, 56(2): 1172-1176. DOI: 10.7498/aps.56.1172
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Effect of O2-doping on bonding configuration and electric properties of SiCOH films prepared by decamethylcyclopentasiloxane electron cyclotron resonance plasma

Acta Phys. Sin., 2007, 56(2): 1172-1176.
DOI: 10.7498/aps.56.1172
CSTR: 32037.14.aps.56.1172
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