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中国物理学会期刊
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Xiao Pei, Zhang Zeng-Ming, Sun Xia, Ding Ze-Jun. Monte Carlo simulation of electron transmission through masks in projection electron lithographyJ. Acta Physica Sinica, 2006, 55(11): 5803-5809. DOI: 10.7498/aps.55.5803
Citation: Xiao Pei, Zhang Zeng-Ming, Sun Xia, Ding Ze-Jun. Monte Carlo simulation of electron transmission through masks in projection electron lithographyJ. Acta Physica Sinica, 2006, 55(11): 5803-5809. DOI: 10.7498/aps.55.5803
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Monte Carlo simulation of electron transmission through masks in projection electron lithography

Acta Phys. Sin., 2006, 55(11): 5803-5809.
DOI: 10.7498/aps.55.5803
CSTR: 32037.14.aps.55.5803
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