Liu Zhi-Wen, Gu Jian-Feng, Fu Wei-Jia, Sun Cheng-Wei, Li Yong, Zhang Qing-Yu. Influence of working pressure on the crystallinity and growth behavior of ZnO films deposited by reactive radio-frequency magnetron sputteringJ. Acta Physica Sinica, 2006, 55(10): 5479-5486. DOI: 10.7498/aps.55.5479
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Citation:
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Liu Zhi-Wen, Gu Jian-Feng, Fu Wei-Jia, Sun Cheng-Wei, Li Yong, Zhang Qing-Yu. Influence of working pressure on the crystallinity and growth behavior of ZnO films deposited by reactive radio-frequency magnetron sputteringJ. Acta Physica Sinica, 2006, 55(10): 5479-5486. DOI: 10.7498/aps.55.5479
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Liu Zhi-Wen, Gu Jian-Feng, Fu Wei-Jia, Sun Cheng-Wei, Li Yong, Zhang Qing-Yu. Influence of working pressure on the crystallinity and growth behavior of ZnO films deposited by reactive radio-frequency magnetron sputteringJ. Acta Physica Sinica, 2006, 55(10): 5479-5486. DOI: 10.7498/aps.55.5479
|
Citation:
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Liu Zhi-Wen, Gu Jian-Feng, Fu Wei-Jia, Sun Cheng-Wei, Li Yong, Zhang Qing-Yu. Influence of working pressure on the crystallinity and growth behavior of ZnO films deposited by reactive radio-frequency magnetron sputteringJ. Acta Physica Sinica, 2006, 55(10): 5479-5486. DOI: 10.7498/aps.55.5479
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