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中国物理学会期刊
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Di Yu-Xian, Ji Xin-Hua, Hu Ming, Qin Yu-Wen, Chen Jin-Long. Residual stress measurement of porous silicon thin film by substrate curvature methodJ. Acta Physica Sinica, 2006, 55(10): 5451-5454. DOI: 10.7498/aps.55.5451
Citation: Di Yu-Xian, Ji Xin-Hua, Hu Ming, Qin Yu-Wen, Chen Jin-Long. Residual stress measurement of porous silicon thin film by substrate curvature methodJ. Acta Physica Sinica, 2006, 55(10): 5451-5454. DOI: 10.7498/aps.55.5451
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Residual stress measurement of porous silicon thin film by substrate curvature method

Acta Phys. Sin., 2006, 55(10): 5451-5454.
DOI: 10.7498/aps.55.5451
CSTR: 32037.14.aps.55.5451
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