Preparation of cubic boron nitride films by radio frequency sputtering

Tian Ling; Ding Yi; Chen Hao; Liu Jun-Kai; Deng Jin-Xiang; He De-Yan; Chen Guang-Hua

doi:10.7498/aps.55.5441

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Tian Ling, Ding Yi, Chen Hao, Liu Jun-Kai, Deng Jin-Xiang, He De-Yan, Chen Guang-Hua. Preparation of cubic boron nitride films by radio frequency sputteringJ. Acta Physica Sinica, 2006, 55(10): 5441-5443. DOI: 10.7498/aps.55.5441

Citation:

Tian Ling, Ding Yi, Chen Hao, Liu Jun-Kai, Deng Jin-Xiang, He De-Yan, Chen Guang-Hua. Preparation of cubic boron nitride films by radio frequency sputteringJ. Acta Physica Sinica, 2006, 55(10): 5441-5443. DOI: 10.7498/aps.55.5441

Citation:

Tian Ling, Ding Yi, Chen Hao, Liu Jun-Kai, Deng Jin-Xiang, He De-Yan, Chen Guang-Hua. Preparation of cubic boron nitride films by radio frequency sputteringJ. Acta Physica Sinica, 2006, 55(10): 5441-5443. DOI: 10.7498/aps.55.5441