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中国物理学会期刊
Di Xiao-Lian, Xin Yu, Ning Zhao-Yuan. Effect of antenna configuration on power transfer efficiency for planar inductively coupled plasmasJ. Acta Physica Sinica, 2006, 55(10): 5311-5317. DOI: 10.7498/aps.55.5311
Citation: Di Xiao-Lian, Xin Yu, Ning Zhao-Yuan. Effect of antenna configuration on power transfer efficiency for planar inductively coupled plasmasJ. Acta Physica Sinica, 2006, 55(10): 5311-5317. DOI: 10.7498/aps.55.5311

Effect of antenna configuration on power transfer efficiency for planar inductively coupled plasmas

CSTR: 32037.14.aps.55.5311
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