Fabrication of nanoimprint mold by multilayer film deposition technique

Zhang Yong-Jun; Li Wei; Meng Xiang-Dong; Yang Jing-Hai; Hua Zhong; Xu Jun; Huang Xin-Fan; Chen Kun-Ji

doi:10.7498/aps.55.2033

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Zhang Yong-Jun, Li Wei, Meng Xiang-Dong, Yang Jing-Hai, Hua Zhong, Xu Jun, Huang Xin-Fan, Chen Kun-Ji, . Fabrication of nanoimprint mold by multilayer film deposition techniqueJ. Acta Physica Sinica, 2006, 55(4): 2033-2037. DOI: 10.7498/aps.55.2033

Citation:

Zhang Yong-Jun, Li Wei, Meng Xiang-Dong, Yang Jing-Hai, Hua Zhong, Xu Jun, Huang Xin-Fan, Chen Kun-Ji, . Fabrication of nanoimprint mold by multilayer film deposition techniqueJ. Acta Physica Sinica, 2006, 55(4): 2033-2037. DOI: 10.7498/aps.55.2033

Citation:

Zhang Yong-Jun, Li Wei, Meng Xiang-Dong, Yang Jing-Hai, Hua Zhong, Xu Jun, Huang Xin-Fan, Chen Kun-Ji, . Fabrication of nanoimprint mold by multilayer film deposition techniqueJ. Acta Physica Sinica, 2006, 55(4): 2033-2037. DOI: 10.7498/aps.55.2033