Study on nucleation and dynamic scaling of morphological evolution of ZnO film deposition by reactive magnetron sputtering

Liu Zhi-Wen; Gu Jian-Feng; Sun Cheng-Wei; Zhang Qing-Yu

doi:10.7498/aps.55.1965

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Liu Zhi-Wen, Gu Jian-Feng, Sun Cheng-Wei, Zhang Qing-Yu. Study on nucleation and dynamic scaling of morphological evolution of ZnO film deposition by reactive magnetron sputteringJ. Acta Physica Sinica, 2006, 55(4): 1965-1973. DOI: 10.7498/aps.55.1965

Citation:

Liu Zhi-Wen, Gu Jian-Feng, Sun Cheng-Wei, Zhang Qing-Yu. Study on nucleation and dynamic scaling of morphological evolution of ZnO film deposition by reactive magnetron sputteringJ. Acta Physica Sinica, 2006, 55(4): 1965-1973. DOI: 10.7498/aps.55.1965

Citation:

Liu Zhi-Wen, Gu Jian-Feng, Sun Cheng-Wei, Zhang Qing-Yu. Study on nucleation and dynamic scaling of morphological evolution of ZnO film deposition by reactive magnetron sputteringJ. Acta Physica Sinica, 2006, 55(4): 1965-1973. DOI: 10.7498/aps.55.1965