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中国物理学会期刊
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Sun Xia, You Si-Fang, Xiao Pei, Ding Ze-Jun. Simulation of the proximity effect of electron beam lithographyJ. Acta Physica Sinica, 2006, 55(1): 148-154. DOI: 10.7498/aps.55.148
Citation: Sun Xia, You Si-Fang, Xiao Pei, Ding Ze-Jun. Simulation of the proximity effect of electron beam lithographyJ. Acta Physica Sinica, 2006, 55(1): 148-154. DOI: 10.7498/aps.55.148
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Simulation of the proximity effect of electron beam lithography

Acta Phys. Sin., 2006, 55(1): 148-154.
DOI: 10.7498/aps.55.148
CSTR: 32037.14.aps.55.148
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