Zr-N films prepared by MW-ECR PE-UNB alanced magnetron sputtering: plasma diagnostics and structure evolution

Zhang Zhi-Guo; Liu Tian-Wei; Xu Jun; Deng Xin-Lu; Dong Chuang

doi:10.7498/aps.54.3257

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Zhang Zhi-Guo, Liu Tian-Wei, Xu Jun, Deng Xin-Lu, Dong Chuang. Zr-N films prepared by MW-ECR PE-UNB alanced magnetron sputtering: plasma diagnostics and structure evolutionJ. Acta Physica Sinica, 2005, 54(7): 3257-3262. DOI: 10.7498/aps.54.3257

Citation:

Zhang Zhi-Guo, Liu Tian-Wei, Xu Jun, Deng Xin-Lu, Dong Chuang. Zr-N films prepared by MW-ECR PE-UNB alanced magnetron sputtering: plasma diagnostics and structure evolutionJ. Acta Physica Sinica, 2005, 54(7): 3257-3262. DOI: 10.7498/aps.54.3257

Citation:

Zhang Zhi-Guo, Liu Tian-Wei, Xu Jun, Deng Xin-Lu, Dong Chuang. Zr-N films prepared by MW-ECR PE-UNB alanced magnetron sputtering: plasma diagnostics and structure evolutionJ. Acta Physica Sinica, 2005, 54(7): 3257-3262. DOI: 10.7498/aps.54.3257