Structure and tribology properties of diamond-like carbon films prepared by microwave electron cyclotron resonance plasma source ion implantation

Gao Peng; Xu Jun; Deng Xin-Lu; Wang De-He; Dong Chuang

doi:10.7498/aps.54.3241

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Gao Peng, Xu Jun, Deng Xin-Lu, Wang De-He, Dong Chuang. Structure and tribology properties of diamond-like carbon films prepared by microwave electron cyclotron resonance plasma source ion implantationJ. Acta Physica Sinica, 2005, 54(7): 3241-3246. DOI: 10.7498/aps.54.3241

Citation:

Gao Peng, Xu Jun, Deng Xin-Lu, Wang De-He, Dong Chuang. Structure and tribology properties of diamond-like carbon films prepared by microwave electron cyclotron resonance plasma source ion implantationJ. Acta Physica Sinica, 2005, 54(7): 3241-3246. DOI: 10.7498/aps.54.3241

Citation:

Gao Peng, Xu Jun, Deng Xin-Lu, Wang De-He, Dong Chuang. Structure and tribology properties of diamond-like carbon films prepared by microwave electron cyclotron resonance plasma source ion implantationJ. Acta Physica Sinica, 2005, 54(7): 3241-3246. DOI: 10.7498/aps.54.3241