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中国物理学会期刊
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Li Hong-Xuan, Xu Tao, Chen Jian-Min, Zhou Hui-Di, Liu Hui-Wen. Effect of RF power on the structure and properties of diamond-like carbon filmsJ. Acta Physica Sinica, 2005, 54(4): 1885-1889. DOI: 10.7498/aps.54.1885
Citation: Li Hong-Xuan, Xu Tao, Chen Jian-Min, Zhou Hui-Di, Liu Hui-Wen. Effect of RF power on the structure and properties of diamond-like carbon filmsJ. Acta Physica Sinica, 2005, 54(4): 1885-1889. DOI: 10.7498/aps.54.1885
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Effect of RF power on the structure and properties of diamond-like carbon films

Acta Phys. Sin., 2005, 54(4): 1885-1889.
DOI: 10.7498/aps.54.1885
CSTR: 32037.14.aps.54.1885
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