Photoluminescence from a-Si:H/SiO2 multilayers fabricated using in situ layer by layer plasma oxidation

Ma Zhong-Yuan; Huang Xin-Fan; Zhu Da; Li Wei; Chen Kun-Ji; Feng Duan

doi:10.7498/aps.53.2746

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Ma Zhong-Yuan, Huang Xin-Fan, Zhu Da, Li Wei, Chen Kun-Ji, Feng Duan. Photoluminescence from a-Si:H/SiO2 multilayers fabricated using in situ layer by layer plasma oxidationJ. Acta Physica Sinica, 2004, 53(8): 2746-2750. DOI: 10.7498/aps.53.2746

Citation:

Ma Zhong-Yuan, Huang Xin-Fan, Zhu Da, Li Wei, Chen Kun-Ji, Feng Duan. Photoluminescence from a-Si:H/SiO2 multilayers fabricated using in situ layer by layer plasma oxidationJ. Acta Physica Sinica, 2004, 53(8): 2746-2750. DOI: 10.7498/aps.53.2746

Citation:

Ma Zhong-Yuan, Huang Xin-Fan, Zhu Da, Li Wei, Chen Kun-Ji, Feng Duan. Photoluminescence from a-Si:H/SiO2 multilayers fabricated using in situ layer by layer plasma oxidationJ. Acta Physica Sinica, 2004, 53(8): 2746-2750. DOI: 10.7498/aps.53.2746