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中国物理学会期刊
Lu Yan, Wang You-Nian. Collisional effects on characteristics of asymmetric radio-frequency sheathsJ. Acta Physica Sinica, 2004, 53(8): 2661-2665. DOI: 10.7498/aps.53.2661
Citation: Lu Yan, Wang You-Nian. Collisional effects on characteristics of asymmetric radio-frequency sheathsJ. Acta Physica Sinica, 2004, 53(8): 2661-2665. DOI: 10.7498/aps.53.2661

Collisional effects on characteristics of asymmetric radio-frequency sheaths

CSTR: 32037.14.aps.53.2661
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