The measurement of square resistance  for microarea by square four-probe techniques and using a modified Rymaszewski’s formula

Liu Xin-Fu; Sun Yi-Cai; Zhang Yan-Hui; Chen Zhi-Yong

doi:10.7498/aps.53.2461

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Liu Xin-Fu, Sun Yi-Cai, Zhang Yan-Hui, Chen Zhi-Yong. The measurement of square resistance for microarea by square four-probe techniques and using a modified Rymaszewski’s formulaJ. Acta Physica Sinica, 2004, 53(8): 2461-2466. DOI: 10.7498/aps.53.2461

Citation:

Liu Xin-Fu, Sun Yi-Cai, Zhang Yan-Hui, Chen Zhi-Yong. The measurement of square resistance for microarea by square four-probe techniques and using a modified Rymaszewski’s formulaJ. Acta Physica Sinica, 2004, 53(8): 2461-2466. DOI: 10.7498/aps.53.2461

Citation:

Liu Xin-Fu, Sun Yi-Cai, Zhang Yan-Hui, Chen Zhi-Yong. The measurement of square resistance for microarea by square four-probe techniques and using a modified Rymaszewski’s formulaJ. Acta Physica Sinica, 2004, 53(8): 2461-2466. DOI: 10.7498/aps.53.2461