Diagnosis of VHF plasmas with optical emission spectroscopy

Yang Hui-Dong; Wu Chun-Ya; Li Hong-Bo; Mai Yao-Hua; Zhu Feng; Zhou Zhen-Hua; Zhao Ying; Geng Xin-Hua; Xiong Shao-Zheng

doi:10.7498/aps.52.2324

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Yang Hui-Dong, Wu Chun-Ya, Li Hong-Bo, Mai Yao-Hua, Zhu Feng, Zhou Zhen-Hua, Zhao Ying, Geng Xin-Hua, Xiong Shao-Zheng. Diagnosis of VHF plasmas with optical emission spectroscopyJ. Acta Physica Sinica, 2003, 52(9): 2324-2330. DOI: 10.7498/aps.52.2324

Citation:

Yang Hui-Dong, Wu Chun-Ya, Li Hong-Bo, Mai Yao-Hua, Zhu Feng, Zhou Zhen-Hua, Zhao Ying, Geng Xin-Hua, Xiong Shao-Zheng. Diagnosis of VHF plasmas with optical emission spectroscopyJ. Acta Physica Sinica, 2003, 52(9): 2324-2330. DOI: 10.7498/aps.52.2324

Citation:

Yang Hui-Dong, Wu Chun-Ya, Li Hong-Bo, Mai Yao-Hua, Zhu Feng, Zhou Zhen-Hua, Zhao Ying, Geng Xin-Hua, Xiong Shao-Zheng. Diagnosis of VHF plasmas with optical emission spectroscopyJ. Acta Physica Sinica, 2003, 52(9): 2324-2330. DOI: 10.7498/aps.52.2324