Phase transformation of AlN in AlN/VN nanomultilayers and its effect on the mech anical properties of films

Lao Ji-Jun; Hu Xiao-Ping; Yu Xiao-Jiang; Li Ge-Yang; Gu Ming-Yuan

doi:10.7498/aps.52.2259

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Lao Ji-Jun, Hu Xiao-Ping, Yu Xiao-Jiang, Li Ge-Yang, Gu Ming-Yuan. Phase transformation of AlN in AlN/VN nanomultilayers and its effect on the mech anical properties of filmsJ. Acta Physica Sinica, 2003, 52(9): 2259-2263. DOI: 10.7498/aps.52.2259

Citation:

Lao Ji-Jun, Hu Xiao-Ping, Yu Xiao-Jiang, Li Ge-Yang, Gu Ming-Yuan. Phase transformation of AlN in AlN/VN nanomultilayers and its effect on the mech anical properties of filmsJ. Acta Physica Sinica, 2003, 52(9): 2259-2263. DOI: 10.7498/aps.52.2259

Citation:

Lao Ji-Jun, Hu Xiao-Ping, Yu Xiao-Jiang, Li Ge-Yang, Gu Ming-Yuan. Phase transformation of AlN in AlN/VN nanomultilayers and its effect on the mech anical properties of filmsJ. Acta Physica Sinica, 2003, 52(9): 2259-2263. DOI: 10.7498/aps.52.2259