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中国物理学会期刊
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Zhang Gu-Ling, Wang Jiu-Li, Yang Wu-Bao, Fan Song-Hua, Liu Chi-Zi, Yang Si-Ze. TiN coating for inner surface modification by grid enhanced plasma source ion im plantationJ. Acta Physica Sinica, 2003, 52(9): 2213-2218. DOI: 10.7498/aps.52.2213
Citation: Zhang Gu-Ling, Wang Jiu-Li, Yang Wu-Bao, Fan Song-Hua, Liu Chi-Zi, Yang Si-Ze. TiN coating for inner surface modification by grid enhanced plasma source ion im plantationJ. Acta Physica Sinica, 2003, 52(9): 2213-2218. DOI: 10.7498/aps.52.2213
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TiN coating for inner surface modification by grid enhanced plasma source ion im plantation

Acta Phys. Sin., 2003, 52(9): 2213-2218.
DOI: 10.7498/aps.52.2213
CSTR: 32037.14.aps.52.2213
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