THE STUDY OF EPITAXIAL GROWTH ZnO THIN FILM ON A (0112) SAPPHIRE SUBSTRATE USING ECR PLASMA SPUTTERING METHOD

WANG JIAN-HUZ; YUAN RUN-ZHANG; WU QIN-CHONG; REN ZHAO-XING

doi:10.7498/aps.48.955

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WANG JIAN-HUZ, YUAN RUN-ZHANG, WU QIN-CHONG, REN ZHAO-XING. THE STUDY OF EPITAXIAL GROWTH ZnO THIN FILM ON A (0112) SAPPHIRE SUBSTRATE USING ECR PLASMA SPUTTERING METHODJ. Acta Physica Sinica, 1999, 48(5): 955-960. DOI: 10.7498/aps.48.955

Citation:

WANG JIAN-HUZ, YUAN RUN-ZHANG, WU QIN-CHONG, REN ZHAO-XING. THE STUDY OF EPITAXIAL GROWTH ZnO THIN FILM ON A (0112) SAPPHIRE SUBSTRATE USING ECR PLASMA SPUTTERING METHODJ. Acta Physica Sinica, 1999, 48(5): 955-960. DOI: 10.7498/aps.48.955

Citation:

WANG JIAN-HUZ, YUAN RUN-ZHANG, WU QIN-CHONG, REN ZHAO-XING. THE STUDY OF EPITAXIAL GROWTH ZnO THIN FILM ON A (0112) SAPPHIRE SUBSTRATE USING ECR PLASMA SPUTTERING METHODJ. Acta Physica Sinica, 1999, 48(5): 955-960. DOI: 10.7498/aps.48.955