PROPERTIES OF ELECTRON CYCLOTRON RESONANCE PLASMAS AND THEIR INFLUENCE ON THE DEPOSITION OF GaN FILMS

DU XIAO-LONG; CHEN GUANG-CHAO; JIANG DE-YI; YAO XIN-ZI; ZHU HE-SUN

doi:10.7498/aps.48.257

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DU XIAO-LONG, CHEN GUANG-CHAO, JIANG DE-YI, YAO XIN-ZI, ZHU HE-SUN. PROPERTIES OF ELECTRON CYCLOTRON RESONANCE PLASMAS AND THEIR INFLUENCE ON THE DEPOSITION OF GaN FILMSJ. Acta Physica Sinica, 1999, 48(2): 257-266. DOI: 10.7498/aps.48.257

Citation:

DU XIAO-LONG, CHEN GUANG-CHAO, JIANG DE-YI, YAO XIN-ZI, ZHU HE-SUN. PROPERTIES OF ELECTRON CYCLOTRON RESONANCE PLASMAS AND THEIR INFLUENCE ON THE DEPOSITION OF GaN FILMSJ. Acta Physica Sinica, 1999, 48(2): 257-266. DOI: 10.7498/aps.48.257

Citation:

DU XIAO-LONG, CHEN GUANG-CHAO, JIANG DE-YI, YAO XIN-ZI, ZHU HE-SUN. PROPERTIES OF ELECTRON CYCLOTRON RESONANCE PLASMAS AND THEIR INFLUENCE ON THE DEPOSITION OF GaN FILMSJ. Acta Physica Sinica, 1999, 48(2): 257-266. DOI: 10.7498/aps.48.257