Search

x
中国物理学会期刊
Advanced Search
NING ZHAO-YUAN, CHENG SHAN-HUA. ETCHING PROPERTIES OF AMORPHOUS HYDROGENATED CARBON FILMS IN A MULTIPOLE ELECTRON CYCLOTRON RESONANCE OXYGEN PLASMA SYSTEMJ. Acta Physica Sinica, 1999, 48(10): 1950-1956. DOI: 10.7498/aps.48.1950
Citation: NING ZHAO-YUAN, CHENG SHAN-HUA. ETCHING PROPERTIES OF AMORPHOUS HYDROGENATED CARBON FILMS IN A MULTIPOLE ELECTRON CYCLOTRON RESONANCE OXYGEN PLASMA SYSTEMJ. Acta Physica Sinica, 1999, 48(10): 1950-1956. DOI: 10.7498/aps.48.1950
shu

ETCHING PROPERTIES OF AMORPHOUS HYDROGENATED CARBON FILMS IN A MULTIPOLE ELECTRON CYCLOTRON RESONANCE OXYGEN PLASMA SYSTEM

Acta Phys. Sin., 1999, 48(10): 1950-1956.
DOI: 10.7498/aps.48.1950
CSTR: 32037.14.aps.48.1950
PDF
导出引用

  • Abstract

    Authors and contacts

    References

Turn off MathJax
Article Contents

Catalog

    /

    DownLoad:  Full-Size Img  PowerPoint
    Return
    Return
    Baidu
    map