THE DEEP LEVEL STUDIES OF n-Si/n+-Si INTERFACE IN SILICON DIRECT BONDING

LU LI-WU; ZHOU JIE; FENG SONG-LIN; QIAN ZHAO-MING; PENG QING

doi:10.7498/aps.43.785

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LU LI-WU, ZHOU JIE, FENG SONG-LIN, QIAN ZHAO-MING, PENG QING. THE DEEP LEVEL STUDIES OF n-Si/n+-Si INTERFACE IN SILICON DIRECT BONDINGJ. Acta Physica Sinica, 1994, 43(5): 785-789. DOI: 10.7498/aps.43.785

Citation:

LU LI-WU, ZHOU JIE, FENG SONG-LIN, QIAN ZHAO-MING, PENG QING. THE DEEP LEVEL STUDIES OF n-Si/n+-Si INTERFACE IN SILICON DIRECT BONDINGJ. Acta Physica Sinica, 1994, 43(5): 785-789. DOI: 10.7498/aps.43.785

Citation:

LU LI-WU, ZHOU JIE, FENG SONG-LIN, QIAN ZHAO-MING, PENG QING. THE DEEP LEVEL STUDIES OF n-Si/n+-Si INTERFACE IN SILICON DIRECT BONDINGJ. Acta Physica Sinica, 1994, 43(5): 785-789. DOI: 10.7498/aps.43.785