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中国物理学会期刊
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LIU CHANG-QING, JIN ZHU-JING, LI MEI-SHUAN, HUHE JI-FU, WU WEI-TAO. CRITICAL CRACKING AND DAMAGE MODE OF TITANIUM NITRIDE FILMSJ. Acta Physica Sinica, 1992, 41(7): 1137-1142. DOI: 10.7498/aps.41.1137
Citation: LIU CHANG-QING, JIN ZHU-JING, LI MEI-SHUAN, HUHE JI-FU, WU WEI-TAO. CRITICAL CRACKING AND DAMAGE MODE OF TITANIUM NITRIDE FILMSJ. Acta Physica Sinica, 1992, 41(7): 1137-1142. DOI: 10.7498/aps.41.1137
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CRITICAL CRACKING AND DAMAGE MODE OF TITANIUM NITRIDE FILMS

Acta Phys. Sin., 1992, 41(7): 1137-1142.
DOI: 10.7498/aps.41.1137
CSTR: 32037.14.aps.41.1137
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