A STUDY ON REACTION KINETICS OF THE RADICALS PRODUCED IN THE LASER-INDUCED SILANE PLASMA

FU GUANG-SHENG; WANG JIN-GUO; LI XIAO-WEI; HAN LI; Lü FU-RUN

doi:10.7498/aps.40.2024

Search

x

FU GUANG-SHENG, WANG JIN-GUO, LI XIAO-WEI, HAN LI, Lü FU-RUN. A STUDY ON REACTION KINETICS OF THE RADICALS PRODUCED IN THE LASER-INDUCED SILANE PLASMAJ. Acta Physica Sinica, 1991, 40(12): 2024-2031. DOI: 10.7498/aps.40.2024

Citation:

FU GUANG-SHENG, WANG JIN-GUO, LI XIAO-WEI, HAN LI, Lü FU-RUN. A STUDY ON REACTION KINETICS OF THE RADICALS PRODUCED IN THE LASER-INDUCED SILANE PLASMAJ. Acta Physica Sinica, 1991, 40(12): 2024-2031. DOI: 10.7498/aps.40.2024

Citation:

FU GUANG-SHENG, WANG JIN-GUO, LI XIAO-WEI, HAN LI, Lü FU-RUN. A STUDY ON REACTION KINETICS OF THE RADICALS PRODUCED IN THE LASER-INDUCED SILANE PLASMAJ. Acta Physica Sinica, 1991, 40(12): 2024-2031. DOI: 10.7498/aps.40.2024