STUDY ON THE BREAKDOWN MECHANISM OF A THIN SixOyNz FILM

CHEN DOU-NAN; LIU BAI-YONG; ZHENG XUE-REN

doi:10.7498/aps.38.68

CHEN DOU-NAN, LIU BAI-YONG, ZHENG XUE-REN. STUDY ON THE BREAKDOWN MECHANISM OF A THIN SixOyNz FILMJ. Acta Physica Sinica, 1989, 38(1): 68-75. DOI: 10.7498/aps.38.68

Citation:

CHEN DOU-NAN, LIU BAI-YONG, ZHENG XUE-REN. STUDY ON THE BREAKDOWN MECHANISM OF A THIN SixOyNz FILMJ. Acta Physica Sinica, 1989, 38(1): 68-75. DOI: 10.7498/aps.38.68

Citation:

CHEN DOU-NAN, LIU BAI-YONG, ZHENG XUE-REN. STUDY ON THE BREAKDOWN MECHANISM OF A THIN SixOyNz FILMJ. Acta Physica Sinica, 1989, 38(1): 68-75. DOI: 10.7498/aps.38.68