INVESTIGATION OF THIN FILM Si3N4 FORMED BY LOW ENERGY ION IMPLANTATION

CHEN GUO-MING; CHEN GUO-LIANG; YANG JIE; ZOU SHI-CHANG

doi:10.7498/aps.37.475

CHEN GUO-MING, CHEN GUO-LIANG, YANG JIE, ZOU SHI-CHANG. INVESTIGATION OF THIN FILM Si3N4 FORMED BY LOW ENERGY ION IMPLANTATIONJ. Acta Physica Sinica, 1988, 37(3): 475-480. DOI: 10.7498/aps.37.475

Citation:

CHEN GUO-MING, CHEN GUO-LIANG, YANG JIE, ZOU SHI-CHANG. INVESTIGATION OF THIN FILM Si3N4 FORMED BY LOW ENERGY ION IMPLANTATIONJ. Acta Physica Sinica, 1988, 37(3): 475-480. DOI: 10.7498/aps.37.475

Citation:

CHEN GUO-MING, CHEN GUO-LIANG, YANG JIE, ZOU SHI-CHANG. INVESTIGATION OF THIN FILM Si3N4 FORMED BY LOW ENERGY ION IMPLANTATIONJ. Acta Physica Sinica, 1988, 37(3): 475-480. DOI: 10.7498/aps.37.475